High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout
نویسندگان
چکیده
منابع مشابه
High-Resolution Low-Latency Capacitive Displacement Sensor
This paper addresses the challenges related to the design of a high-resolution, low-latency capacitive displacement sensor. An auto-alignment mechanism of the sensor head is proposed which relaxes the resolution requirement of the readout circuit. Different interfacing principles are investigated and analyzed, and the advantage of using a switched-capacitor readout topology for a specific appli...
متن کاملDesign of Novel High Sensitive MEMS Capacitive Fingerprint Sensor
In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...
متن کاملINTEGRATED INTERFACE ELECTRONICS FOR CAPACITIVE MEMS INERTIAL SENSORS Doctoral Dissertation
OF DOCTORAL DISSERTATION AALTO UNIVERSITY SCHOOL OF SCIENCE AND TECHNOLOGY P.O. BOX 11000, FI-00076 AALTO http://www.aalto.fi Author Lasse Aaltonen Name of the dissertation Manuscript submitted May 3, 2010 Manuscript revised August 30, 2010 Date of the defence October 29, 2010 Article dissertation (summary + original articles) Monograph Faculty Department Field of research Opponent(s) Superviso...
متن کاملCmos Readout Interfaces for Mems Capacitive Microphones
This dissertation demonstrates the feasibility of three novel low-power and low-noise schemes for the readout interfaces of MEMS Capacitive Microphones (MCM) by presenting their detailed design descriptions and measurement results as application-specific ICs (ASIC) in CMOS technology developed to exploit their application scope in consumer electronics and hearing aids. MCMs are a new generation...
متن کاملCapacitive position measurement for high-precision space inertial sensor
Low noise position measurement is fundamental for space inertial sensors, and at present the capacitive position sensor is widely employed for space inertial sensors. The design for the possible suppression of the front-end electric noises for a capacitive sensor is presented. A prototype capacitive sensor with 2×10−6pF/Hz1/2 at frequency above 0.04 Hz is achieved and further improvements are d...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Microsystems & Nanoengineering
سال: 2019
ISSN: 2055-7434
DOI: 10.1038/s41378-019-0105-y